​​6inch Heat-Resistant Transparent Monocrystalline Quartz Crystal Substrate for SAW Devices​​

​​6inch Heat-Resistant Transparent Monocrystalline Quartz Crystal Substrate for SAW Devices​​

The 6-inch quartz wafer (150mm diameter) is fabricated from high-purity quartz glass (purity ≥99.999%) with thickness ranging from 50-500μm. Surface roughness is controlled to Ra ≤0.5nm through CMP (Chemical Mechanical Polishing). The manufacturing process includes: ​​

· Raw Material Purification​​: Extraction of electronic-grade silicon from quartz sand via chlorination and reduction processes, achieving 99.9999% purity. ​​

· Single-Crystal Growth​​: Cultivation of single-crystal silicon rods using the Czochralski (CZ) method, with defect density <1 defect/cm². ​​

· Cutting and Processing​​: Slicing silicon rods into 150mm wafers via multi-wire sawing, followed by double-sided polishing and laser etching to ensure thickness tolerance ≤±15μm.

Parameter for 6inch quartz wafer

Core Characteristics and Advantages​​ of 6inch quartz wafer

The 6-inch quartz wafer is a circular thin film made of high-purity quartz material, widely used in semiconductor manufacturing, optoelectronics, and precision optics. Key features include:

· ​​High Purity and Thermal Resistance​​: Quartz glass purity ≥99.999%, softening point ~1730°C, short-term tolerance up to 1450°C.

​​· Low Thermal Expansion​​: Thermal expansion coefficient 0.5×10⁻⁶/°C (25-300°C), capable of withstanding thermal shock (ΔT ≥800°C).

​​· Chemical Stability​​: Resists corrosion from all acids except hydrofluoric acid, with corrosion resistance 30× higher than ceramics and 150× higher than stainless steel.

​​· Optical Performance​​: High transmittance in the ultraviolet to near-infrared spectrum (visible light >93%, near-infrared >95%).

​​· Mechanical Strength​​: Mohs hardness of 7, compressive strength superior to standard glass.

Applications​ of 6inch quartz wafer

1. ​​Semiconductor Manufacturing​​: Used in diodes, transistors, and MOSFETs, supporting automotive electronics and power semiconductors.

​​2. Optoelectronics​​: Serves as substrates for optical fibers, laser devices, and waveguides in 5G networks and data centers.

3. ​​Precision Optics​​: Applied in infrared imaging systems, laser optics, and high-transmittance lenses.

​​4. Sensors and Instruments​​: Core components in MEMS sensors and medical diagnostic equipment.

5. ​​Aerospace​​: High-temperature optical windows and heat-resistant components for spacecraft.

Quartz Tube Introduction

Quartz tubes are high-purity quartz glass fabricated into tubular structures, widely used in semiconductor diffusion/oxidation processes and photovoltaic equipment. Our services include:

· ​​Custom Processing​​: Inner diameters (5-50mm), lengths (100-1000mm), and wall thicknesses (0.5-3mm). Complex geometries (bent, multi-chamber tubes) are supported.

· ​​Technical Advantages​​: Operates at 1100°C long-term, low hydroxyl content (<1ppm), and high contamination resistance, meeting semiconductor-grade cleanliness requirements.